| 摘要 |
A transfer apparatus and method for transferring a wafer from one location to another in a controlled environment. The apparatus includes a movable member for supporting a wafer thereon, which member is operative for transferring the wafer from one location to another. The apparatus is characterized by environment control means connected to the member for maintaining the wafer in a controlled environment while transferring the wafer from one location to another independent of the environment surrounding the member. The environmental control means in accordance with one embodiment includes a first shroud overlying a portion of the member to provide a chamber for receiving the wafer, and a second shroud overlying and spaced from the first shroud to provide a passageway therebetween. A first supply means is provided in communication with the chamber for supplying a gas therein and a second supply means is provided in communication with the passageway for supplying a gas therein.
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