DEVICE OF GROWING MOLECULAR BEAM CRYSTAL AND TRANSPORTATION OF SUBSTRATE HOLDER,申请号JP19900207158-传众专利搜索

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发明名称	DEVICE OF GROWING MOLECULAR BEAM CRYSTAL AND TRANSPORTATION OF SUBSTRATE HOLDER
摘要
申请公布号	JPH0492886(A)	申请公布日期	1992.03.25
申请号	JP19900207158	申请日期	1990.08.03
申请人	FUJITSU LTD	发明人	NAKAMURA TOSHIHIRO
分类号	C30B23/08;B65G49/07;H01L21/203;H01L21/50;H01L21/677;H01L21/68	主分类号	C30B23/08
代理机构		代理人
主权项
地址

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