MANUFACTURE OF COMPOSITE PIEZOELECTRIC MATERIAL

摘要

PURPOSE:To uniformize characteristic and to improve yield by forming notches to a piezoelectric ceramic flat plate so as to form two-dimension arrangement in orthogonal directions and leaving part of the notches at least while a high polymer resin is packed to the notches. CONSTITUTION:Notches are formed to a piezoelectric ceramic flat plate 11 at a prescribed interval P1 along a prescribed direction by a dicing machine. In this case, notches are formed so as to form a notch leave part 13 of nearly 10% of the thickness of the piezoelectric ceramic 11 toward a fixed base 12 of the piezoelectric ceramic 11. Then a high polymer resin 3 such as silicon rubber or epoxy resin is packet in gaps 14 bing the notches. Notches are formed at a prescribed interval P2 similarly along a direction B. Then the ceramic 11 is ground by a prescribed thickness to remove the notch leave part 13. Since the contact area of the fixed base 12 is much increased, scattering of elements of the piezoelectric ceramic due to a processing stress is prevented.