| 摘要 |
PURPOSE:To obtain distilled water having extremely high purity and suitable for a use such as the manufacturing of a semiconductor, the electronic industry, the preparation of medicines and medical treatment by providing a hydrophobic porous membrane and constituting the constitutional member becoming the contact state with distilled water on the downstream side of the hydrophobic porous membrane of titanium or a titanium alloy. CONSTITUTION:The steam generated from a distiller 10 is brought to a high temp. and high pressure state by a heating means 12 such as a heater or a compressor to be passed through a hydrophobic porous membrane apparatus 13 and a minute particle or water mist is removed from the steam. The steam passes through the hydrophobic porous membrane apparatus 13 and subsequently flows along the inner surface of a heat generating surface 11 to be condensed with the heat exchange with hot water. The inner surfaces of the constitutional parts, for example, the heat transfer part 11 and pipings 14, 16 of the apparatus becoming the contact state with the steam after the transmission through the hydrophobic porous membrane of the hydrophobic porous membrane apparatus 13 and the distilled water obtained by the condensation of steam are entirely formed with titanium or a titanium alloy, and the mixing of the impurity eluted from the constitutional member of the apparatus with steam or distilled water is prevented.
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