| 摘要 |
A metrology system includes means for generating an interference fringe pattern as a function of a parameter to be measured, transducer apparatus for simultaneously generating three intensity-modulated optical signals, IR, IS and IT, that are related to the interference fringe pattern; signal processing apparatus for accurately determining an aspect of the interference fringe pattern from the three signals; means for accumulating phase information proportional to the aspect of the interference fringe pattern; and means for converting the accumulated phase and aspect information to desired outputs indicative of the parameter to be measured.
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