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发明名称
SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING THE SAME
摘要
申请公布号
US5098855(A)
申请公布日期
1992.03.24
申请号
US19900479151
申请日期
1990.03.28
申请人
HITACHI, LTD.
发明人
KOMORI, KAZUHIRO;KURODA, KENICHI;SUGIURA, JUNE
分类号
H01L21/28;H01L21/8247;H01L27/105
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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