| 摘要 |
PURPOSE:To shorten the time for production and to reduce the cost of production as well as to facilitate the management of a production process by consisting the above waveguide of a waveguide layer which is provided on a conductive substrate and consists of a material having an electrooptical effect and a partial electrode which is provided on the waveguide layer. CONSTITUTION:This waveguide is constituted by laminating the substrate 2, the waveguide layer 3 and the partial electrode 4. Then, the respective layers are produced easily by using thin-film forming techniques, such as vapor deposition and sputtering. The time for production is drastically shortened as compared with the thin-film optical waveguide produced by using a heat diffusing method. In addition, the cost of production is reduced. Further, the thickness of the waveguide layer 3 and the width, etc., of the partial electrode 4, are controlled with high accuracy and the management of the production process is facilitated if the waveguide layer 3 and the partial electrode 4 are formed by the vapor deposition and sputtering, etc. |
