| 摘要 |
PURPOSE:To allow the easy and efficient focusing of laser beams to plural processing points and the simultaneous execution of desired processing at the plural processing points by respectively deflecting the light of the P polarization component of the laser beams and the light of the S polarization component of the beams and focusing the light to a work. CONSTITUTION:The laser beam emitted from a laser device 11 11 is divided to the plural light beams and these light beams are focused to the plural points of the work 14, by which the plural points of the work 14 are subjected to laser beam processing. The progressing direction of the light Lp2 of the P polarization component of the above-mentioned laser beam L0 and the progressing direction of the light Ls2 of the S polarization component are varied by polarizing prisms 16, 17. The light Lp2 of the P polarization component and the light Ls2 of the S polarization component are focused respectively to the work 14 by a condenser lens system 13. The polarizing prisms 16, 17 of the above-mentioned polarized light deflecting means are the prisms which can vary the angle formed by the progressing direction of the light Lp2 of the P polarization component and the progressing direction of the light Ls2 of the S polarization component. Further, The energy ratio of the light of the P polarization component and the S polarization component is preferably varied by interposing a quarter- wave plate 15 between the above-mentioned laser device 11 and the above-mentioned polarizing prisms 16,17 as a phase difference changing means which can change the difference between the phase of the light Lp2 of the P polarization component and the phase of the light Ls2 of the S polarization component. |
