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发明名称
MANUFACTURE OF THIN FILM TRANSISTOR
摘要
申请公布号
JPH0488641(A)
申请公布日期
1992.03.23
申请号
JP19900203561
申请日期
1990.07.31
申请人
TOSHIBA CORP
发明人
UCHIKOGA SHIYUUICHI
分类号
H01L27/12;H01L21/336;H01L29/78;H01L29/786
主分类号
H01L27/12
代理机构
代理人
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