TEST DEVICE OF SEMICONDUCTOR DEVICE,申请号JP19900205811-传众专利搜索

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发明名称	TEST DEVICE OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH0488649(A)	申请公布日期	1992.03.23
申请号	JP19900205811	申请日期	1990.07.31
申请人	MITSUBISHI DENKI ENJINIARINGU KK;MITSUBISHI ELECTRIC CORP	发明人	NAKAJIMA HIROYUKI;KAWAGUCHI KATSUJI
分类号	H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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