| 摘要 |
PURPOSE:To form the optical waveguide including a rib type optical waveguide on an opaque substrate by packing a liquid material into a stamper having the recessed shape of an optical waveguide shape and joining the opaque substrate onto the optical waveguide layer cured by irradiation with energy, then removing the stamper. CONSTITUTION:A UV curing resin 2A is dropped onto the stamper 1 having a hollow groove 1a corresponding to a rib part and is irradiated with UV rays after spin coating, by which the UV curing resin 2A is cured; thereafter, the opaque substrate 4 is joined onto the UV curing resin 2A by using a joining material 3, such as epoxy resin or thermosetting resin. A material having the refractive index smaller than the refractive index of the UV curing resin 2A is selected as the joining material 3 so as to allow light guiding in a core layer. After the opaque substrate 4 is joined into the UV curing resin 2A, the stamper 1 is peeled to form the core layer having the rib part 2a on the opaque substrate 4. The optical waveguide is formed on the opaque substrate by using the liquid material which is cured by the light energy in this way. |
