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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH0485933(A)
申请公布日期
1992.03.18
申请号
JP19900199291
申请日期
1990.07.30
申请人
HITACHI LTD
发明人
OOGOYA KAORU
分类号
H01L23/52;H01L21/3205;H01L21/82
主分类号
H01L23/52
代理机构
代理人
主权项
地址
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