| 摘要 |
<p>A method of transferring a substrate between a stage for holding a substrate thereon and a conveying hand for conveying the substrate, is disclosed. In an aspect, the method includes the steps of: moving the conveying hand having the substrate held thereon to a stage attraction starting position; starting attraction, through the stage, of the substrate held by the conveying hand; moving the conveying hand to a transfer position on a side of an attracting surface of the stage remote from the stage attraction starting position; and releasing the attraction of the substrate through the conveying hand. <IMAGE></p> |
