DRY-ETCHING METHOD AND APPARATUS THEREFOR,申请号EP19850306563-传众专利搜索

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发明名称	DRY-ETCHING METHOD AND APPARATUS THEREFOR
摘要
申请公布号	EP0175561(B1)	申请公布日期	1992.03.18
申请号	EP19850306563	申请日期	1985.09.16
申请人	KABUSHIKI KAISHA TOSHIBA	发明人	SEKINE, MAKOTO C/O PATENT DIVISION;OKANO, HARUO C/O PATENT DIVISION;HORIIKE, YASUHIRO C/O PATENT DIVISION
分类号	H01L21/302;H01L21/3065;H01L21/311;H01L21/3213	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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