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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0485869(A)
申请公布日期
1992.03.18
申请号
JP19900198793
申请日期
1990.07.26
申请人
SEIKO EPSON CORP
发明人
INOUE SUSUMU
分类号
H01L27/092;H01L21/28;H01L21/8238
主分类号
H01L27/092
代理机构
代理人
主权项
地址
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