Method of producing semiconductor device including Schottky barrier diode.

摘要

A method of producing a semiconductor device including a Schottky barrier diode (SBD) comprising the steps of: selectively forming an insulating layer (26) having a first contact hole and a second contact hole, on a (100) silicon semiconductor substrate (21); selectively forming a polysilicon layer (33A, 33B, 33C) extending from the first contact hole to the second contact hole, the polysilicon layer (33A) having an viahole (32) within the first contact hole for selectively exposing the silicon semiconductor substrate (21); and selectively depositing a refractory metal (tungsten or molybdenum) layer (41) on the polysilicon layer and an exposed portion of the substrate within the viahole (32) by a selective CVD process, so that the SBD is formed between the exposed portion and the metal layer (41). The refractory metal layer (41) is formed on the silicon of the exposed portion of the substrate (21) and the polysilicon layer (33A, 33B, 33C) and is not formed on the insulating layer (26), and thus it is unnecessary to perform a photolithography process for patterning the refractory metal layer.