发明名称 Cantilever for use in atomic force microscope and manufacture method therefor.
摘要 <p>A cantilever for an atomic force microscope comprises: a diamond stylus 110 disposed to confront the surface of a sample for the purpose of detecting atomic force; a stylus 160 holding portion at least a portion of which is made of a magnetic material and which holds the diamond stylus; and a lever 120 having an end which is secured and the other end to which the stylus holding portion is fastened, the lever being deformed in accordance with the atomic force acting between the diamond stylus and the sample. A method of manufacturing the cantilever comprises the steps of: securing a rough diamond to a stylus holding portion at least a portion of which is made of magnetic substance; forming a stylus by grinding the rough diamond; magnetizing the magnetic substance of the stylus holding portion; applying an adhesive to the surface of a lever; securing the stylus holding portion on the surface of the lever on which the adhesive is applied by magnetic force of a magnet disposed in the vicinity of the lever; and removing the magnet from the lever after the adhesive has been hardened and the magnetic substance of the stylus holding portion is demagnetized. <IMAGE></p>
申请公布号 EP0475559(A2) 申请公布日期 1992.03.18
申请号 EP19910301821 申请日期 1991.03.05
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 NISHIOKA, TADASHI;YASUE, TAKAO;KOYAMA, HIROSHI
分类号 G01B21/30;G01B5/28;G01B7/34;G01N23/00;G01N37/00;G01Q60/38;G01Q70/14;H01J37/28 主分类号 G01B21/30
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