PLANARIZATION PROCESS FOR SEMICONDUCTOR STRUCTURES,申请号EP19860108755-传众专利搜索

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发明名称	PLANARIZATION PROCESS FOR SEMICONDUCTOR STRUCTURES
摘要
申请公布号	EP0212149(B1)	申请公布日期	1992.03.18
申请号	EP19860108755	申请日期	1986.06.27
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	CSERVAK, NANCY REBECCA;FRIBLEY, SUSAN KAY;GOTH, GEORGE RICHARD;TAKACS, MARK ANTHONY
分类号	H01L21/76;H01L21/302;H01L21/3065;H01L21/31;H01L21/312;H01L21/762	主分类号	H01L21/76
代理机构		代理人
主权项
地址

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