APPARATUS FOR FORMING A THIN FILM,申请号EP19870119083-传众专利搜索

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发明名称	APPARATUS FOR FORMING A THIN FILM
摘要
申请公布号	EP0288608(B1)	申请公布日期	1992.03.18
申请号	EP19870119083	申请日期	1987.12.23
申请人	MITSUBISHI DENKI KABUSHIKI KAISHA	发明人	ITO, HIROSHI C/O ITAMI SEISAKUSHO
分类号	H01L21/203;C23C14/00;C23C14/22;C23C14/32	主分类号	H01L21/203
代理机构		代理人
主权项
地址

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