ETCHING METHOD FOR AL MATERIAL FILM,申请号JP19900201976-传众专利搜索

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发明名称	ETCHING METHOD FOR AL MATERIAL FILM
摘要
申请公布号	JPH0485929(A)	申请公布日期	1992.03.18
申请号	JP19900201976	申请日期	1990.07.30
申请人	SONY CORP	发明人	SHINOHARA KEIJI
分类号	H01L21/302;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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