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发明名称
MANUFACTURE OF INTEGRATED CIRCUIT
摘要
申请公布号
JPH0485865(A)
申请公布日期
1992.03.18
申请号
JP19900198719
申请日期
1990.07.26
申请人
MITSUBISHI ELECTRIC CORP
发明人
TOMIOKA MASANORI
分类号
H01L27/01;H05K1/02;H05K1/16
主分类号
H01L27/01
代理机构
代理人
主权项
地址
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