| 摘要 |
<p>PURPOSE:To obtain a sensor characterized by high measuring accuracy and quick response speed by using an insulating substrate wherein moisture-proof treatment is applied. CONSTITUTION:An alumina substrate 1 is submerged into inorganic glass paste. Or screen printing is applied on the entire surface. The substrate is lifted up and baked. Thus, a moisture-proof film 2 is formed. In this insulating substrate (alumina substrate) 1, water-absorbing property becomes very low, reception of water molecules becomes less even in high humidity and re-adsorption of water molecules becomes very low when the high-humidity atmosphere is returned to the low humidity atmosphere. Therefore, the effect of the substrate which is imparted on the adsorbing and desorbing properties of the water molecules in a moisture sensitive body can be decreased to the minimum degree. Thus, the hysteresis characteristic is remarkably improved. The adsorption of the water molecules is limited to the moisture sensitive film 2. The re- adsorption due to the adsorption of the water molecules with the substrate 1 becomes very small. Therefore, the delay in response of the moisture sensitive body is eliminated, and the response speed can be made quick.</p> |
