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发明名称
METHOD OF APPLYING A BEVELLED EDGE CONTOUR TO A SEMICONDUCTOR WAFER
摘要
申请公布号
EP0264679(B1)
申请公布日期
1992.03.18
申请号
EP19870114331
申请日期
1987.10.01
申请人
BBC BROWN BOVERI AG
发明人
DLOUHY, JIRI
分类号
B24B9/06;B24B9/00;H01L21/304;H01L29/06;H01L29/74
主分类号
B24B9/06
代理机构
代理人
主权项
地址
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