| 摘要 |
PURPOSE:To increase the sampling density of image intensity distribution information effectively by forming plural equivalent images by using a luminous-flux splitting means and setting a fine lens array at relative positions so that respective images are seen at different positions. CONSTITUTION:Two pieces of image-formation luminous flux 18 and 19 split by a luminous-flux splitting and reflection mirror 13 form equivalent images, so the effective sampling pitch of an image intensity distribution is reduced to half when two fine lens arrays of lenses 141, 142- and 161, 162- are in half-pitch position shift relation. In this case, information on the image intensity distribution uses a signal sequence of 1511, 1711, 1521, 1721, 1531, 1731-, i.e. a combination of output signals of an array of sensors 1511, 1521, 1531- and output signals of an array of sensors 1711, 1721, 1731- and a signal sequence of 1512, 1712, 1522, 1532, 1732-, i.e. a combination of output signals of an array of sensors 1512, 1522, 1532- and output signals of an array of sensors 1712, 1722, 1732-. |
