| 发明名称 |
Pattern area ratio measuring apparatus |
| 摘要 |
A pattern area ratio measuring apparatus includes a diffusing unit. The diffusing unit is arranged before light sources and irregularly reflects radiation light to a plate to be measured.
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| 申请公布号 |
US5096299(A) |
申请公布日期 |
1992.03.17 |
| 申请号 |
US19900528766 |
申请日期 |
1990.05.24 |
| 申请人 |
KOMORI CORPORATION |
发明人 |
SHIZUYA, FUMIO |
| 分类号 |
B41F31/02;G01B11/28;G01J1/44;G01N21/47 |
主分类号 |
B41F31/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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