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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH0483370(A)
申请公布日期
1992.03.17
申请号
JP19900197045
申请日期
1990.07.25
申请人
HITACHI LTD
发明人
YAMADA TOMIO;YAMAZAKI KAZUO
分类号
H01L23/02;H01L23/50
主分类号
H01L23/02
代理机构
代理人
主权项
地址
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