发明名称 PRODUCTION OF LAMELLAR SINGLE CRYSTAL
摘要 PURPOSE:To obtain the title broad single crystal in high efficiency by drawing a single crystal horizontally on a liquid supporting material so as to allow it to slide thereon to ensure a large area smooth plane to be utilized as a substrate. CONSTITUTION:Firstly, a supporting material 4 (e.g. lead) higher in specific gravity but lower in melting point than a material to be aimed for single crystal (e.g. silicon) is heated by a heater 5 to a temperature higher than the melting point of the object material and melted. Thence, the resulting melt surface is fed with a solid raw material for the object material from a raw material stack 1 to effect melting into a melt 3. A seed crystal 7 for the object material is then brought into contact with the melt 3 along with feeding a cooling gas through a feed pipe 2 onto the melt 3 to effect cooling the melt surface and grow a single crystal 6, which is then drawn horizontally along the melt surface of the supporting material 4, thus giving the objective lamellar single crystal 6.
申请公布号 JPH0483789(A) 申请公布日期 1992.03.17
申请号 JP19900195346 申请日期 1990.07.23
申请人 KOBE STEEL LTD 发明人 TAKEMURA ATSUSHI
分类号 C30B15/06;H01L21/208;H01L31/04 主分类号 C30B15/06
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