发明名称 CURE DEVICE
摘要 PURPOSE:To contrive to improve the cleanness of a work by equipping an activation means for activating a high temperature gas to be fed. CONSTITUTION:A high-temperature gas 9 fed into a high temperature gas feed chamber 5 from a pipe 10 is activated, when ultraviolet rays are applied to the gas by means of an ultraviolet lamp 11, and the activated high temperature gas 9a is fed to a work 18 via slit 2. Because the high temperature gas is activated in this manner, the gas reacts radically with organic matter generated from a thermosetting cementing material so as to become a chemically stable macromolecules to be removed outward by degassing from the tip surface and its circumference. In this case, because the reaction with the activated gas is far superior to the physical accumulation of the organic matter on the tip surface, the organic matters are separated in the manner of coming off the tip surface so that the cleanness of a tip is preserved remarkably.
申请公布号 JPH0483351(A) 申请公布日期 1992.03.17
申请号 JP19900197030 申请日期 1990.07.25
申请人 SHINKAWA LTD 发明人 ARAI MITSUO;SHIMODA YASUO;KITAMURA TAKEAKI
分类号 H01L21/52 主分类号 H01L21/52
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