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发明名称
VAPOR PHASE SYNTHESIS OF DIAMOND
摘要
申请公布号
JPH0483796(A)
申请公布日期
1992.03.17
申请号
JP19900194624
申请日期
1990.07.23
申请人
HITACHI CHEM CO LTD
发明人
YAMANOI KIYOSHI;INOUE MITSUHIRO
分类号
C30B29/04;C23C16/26;C23C16/27;C23C16/50
主分类号
C30B29/04
代理机构
代理人
主权项
地址
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