Linear actuator

摘要

A linear attuator of the present invention performs the fixing of a driving base by the primary fine means when the deflection of the moving velocity of the driving base in a driven direction and the moving velocity of the primary fine means driven by the secondary fine means in the driven direction becomes less than or equal to a specified allowable value, i.e., when the relating velocity becomes nearly zero, and moves the primary fine means driven by the secondary fine means in the direction opposite to that of the driven direction after not transferring the driving force of the secondary fine means to the driving base when the driving base is separated from the primary fine means. Thus, the driving base can be driven by a stroke longer than the driving stroke of the fine actuator itself at a specific velocity and it can be driven smoothly.