| 摘要 |
PCT No. PCT/EP89/00001 Sec. 371 Date Aug. 24, 1989 Sec. 102(e) Date Aug. 24, 1989 PCT Filed Jan. 3, 1989.A regulating circuit for the servo drive for the mobile precision optics of an equipment for high-precision measuring of micro-contours of a work-piece surface contains a position transmitter (40) which ascertains the actual position of the precision optics to correct disturbances caused by vibration and shaking. This is part of an internal loop comprising a proportional-derivative controller (68) and an integral controller (70). An external loop which predetermines the reference input for the internal loop formed by these elements contains an integral controller (74) which receives a signal from a detector (82) which corresponds to the spacing of the just measured point on the test surface from the focal point of the precision optics. The local reflection behaviour of the test surface is measured (84) and used for correcting the gradient of the control characteristics (86).
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