FORMATION OF ELECTRICALLY CONDUCTIVE GRAPHITE FILM

摘要

PURPOSE:To obtain a graphite film having excellent electrical conductivity by utilizing hydrocarbon as a raw material and forming the film on a base plate contg. transition metal which is heated at the specified temp. in a plasma CVD device separated into a plasma discharge chamber and a formation chamber. CONSTITUTION:The whole system contg. a vacuum chamber 1 and a reactor 6 is vacuumized at about 10<-2>mmHg by an oil-sealed rotary vacuum pump 4. A base material 3 contg. transition metal is heated at >=1200 deg.C by a heater 2. A valve 11 is opened and the vapor of a raw material 13 (hydrocarbon) is allowed to flow through a reaction pipe 6, a nozzle 7, a vacuum chamber 1, a valve 5 and the oil-sealed rotary vacuum pump 4. The inside of this system is held at the prescribed pressure. Plasma discharge is performed for the vapor of the raw material by impressing a high-frequency electric field to an electrode 8. This vapor of the raw material is drawn through the nozzle 7 and a graphite film is formed on the base material 3. Thereby the electrically conductive graphite film is obtained which has characteristics of <=6.72Angstrom lattice constants Co and >=2000S/cm conductivity.