| 摘要 |
PURPOSE:To efficiently align in a short time by sucking to hold a reticle by a chuck, moving down a Z stage after alignment of XYtheta of the reticle is finished, delivering the chuck to a supporting base, and sucking to hold it. CONSTITUTION:A reticle 1 is placed on a chuck 4 by a conveyor, and sucked to be held. Then, deviation amount of the reticle in a plane direction to a reference mark 2 is measured by a detector 3. In order to reduce the deviation to '0', the deviation is converted into a moving distance of an XYtheta stage 9 at a contact point of rollers 28, 29, 30 of three positions with the stage 9 from the geometrical relationship between the point and the mark 2. Then, a piezo (Z) 7 for lifting a Z stage 5 is driven to be retracted, and the stage 5 is moved down by the recoiling strength of a leaf spring 6 and own weight. The moving distance is measured by a sensor (Z) 8, and fed back to the piezo (Z) 7. When the stage 5 is moved down, the chuck 4 is placed on a supporting base 12, and sucked to be held. |
