ELECTRON BEAM EXCITATION DRY ETCHING AND ITS DEVICE,申请号JP19900199651-传众专利搜索

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发明名称	ELECTRON BEAM EXCITATION DRY ETCHING AND ITS DEVICE
摘要
申请公布号	JPH0484429(A)	申请公布日期	1992.03.17
申请号	JP19900199651	申请日期	1990.07.27
申请人	NEC CORP	发明人	KOJIMA YOSHIKATSU;MATSUI SHINJI
分类号	C23F4/00;H01L21/302;H01L21/3065	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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