发明名称 |
Intelligent waxer carrier |
摘要 |
Disclosed is a system mounted with a transportable container for carrying articles such as semiconductor wafers which comprises a non-volatile memory used to store the identity, status and history of the articles in the container. Further, the system includes means for transmitting data from the memory to an information processor associated with a processing station which processes the articles in a carrier. In a preferred embodiment, the system includes data processing capability and both receives data from and transmits data to the processing station.
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申请公布号 |
US5097421(A) |
申请公布日期 |
1992.03.17 |
申请号 |
US19870054212 |
申请日期 |
1987.05.18 |
申请人 |
ASYST TECHNOLOGIES, INC. |
发明人 |
MANEY, GEORGE A.;BONORA, ANTHONY C.;PARIKH, MIHIR;BRAIN, MICHAEL D. |
分类号 |
B65G43/00;G03F7/20;G05B15/02;H01L21/02;H01L21/027;H01L21/304;H01L21/673;H01L21/677 |
主分类号 |
B65G43/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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