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发明名称
DRY ETCHING METHOD
摘要
申请公布号
JPH0484414(A)
申请公布日期
1992.03.17
申请号
JP19900198044
申请日期
1990.07.27
申请人
SONY CORP
发明人
KADOMURA SHINGO
分类号
H01L21/027;G03F7/36;H01L21/311
主分类号
H01L21/027
代理机构
代理人
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