| 摘要 |
PURPOSE:To obtain the reticle having pattern arrangement which enables an increase in the size of a chip pattern by arranging alignment patterns so that the alignment patterns is not included in an area formed extending the chip pattern area in the long-side direction of the chip pattern. CONSTITUTION:When the chip pattern area is extended in the long-side direction of the rectangular chip pattern 12, none of the alignment patterns 11a - 11d is included in the area. When the alignment patterns 11a - 11d are formed at four places of peripheral parts in a circular common effective resolution range 13 while held at, for example, 90 deg. to one another, the chip pattern 12 whose axis parallel to the long-side direction of the rectangular chip pattern 12 is at a certain angle, e.g. 45 deg. to the axis in the direction where an alignment pattern is present is arranged. Therefore, the chip pattern 12 can be arranged by using the effective resolution range 13 fully and effectively without overlapping with the alignment patterns 11a - 11d. Consequently, the chip pattern can be increased in size. |
