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发明名称
DEPOSITION METHOD
摘要
申请公布号
JPH0480363(A)
申请公布日期
1992.03.13
申请号
JP19900195262
申请日期
1990.07.24
申请人
SONY CORP
发明人
SUMI HIROBUMI
分类号
C23C16/06;H01L21/28;H01L21/285
主分类号
C23C16/06
代理机构
代理人
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地址
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