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发明名称
PLASMA ETCHING DEVICE
摘要
申请公布号
JPH0480382(A)
申请公布日期
1992.03.13
申请号
JP19900192463
申请日期
1990.07.20
申请人
TOKYO ELECTRON LTD;TOSHIBA CORP
发明人
ARAMI JIYUNICHI;ENDO TAMIO;KOYAMA SHIRO;HASEGAWA KATSUHIRO;OKANO HARUO
分类号
C23F4/00;H01L21/302;H01L21/3065
主分类号
C23F4/00
代理机构
代理人
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