THIN FILM FORMING DEVICE,申请号JP19850168428-传众专利搜索

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发明名称	THIN FILM FORMING DEVICE
摘要
申请公布号	JPS6230872(A)	申请公布日期	1987.02.09
申请号	JP19850168428	申请日期	1985.07.30
申请人	TOYOTA MOTOR CORP	发明人	SHIMIZU TATSUHIKO;HASEGAWA HIROSHI;NAKANO KENJI
分类号	C23C14/22;C23C14/24	主分类号	C23C14/22
代理机构		代理人
主权项
地址

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