VERFAHREN UND VORRICHTUNG ZUR ANALYSE UND BESTIMMUNG DER KONZENTRATION VON ELEMENTEN IN VORBESTIMMTEN TIEFEN VON OBJEKTEN

摘要

The proposal is for a process and device for the analysis and determination of the concentration of elements at predeterminable depths in substantially plane objects of low roughness by spectroscopic methods. Here, the object is first scraped by the use of an evaporative or pulverisation process and then the scraped molecular and/or atomic particles of the object are transferred in the vapour or finely divided phase to a substrate form of a layer and said layer is analysed by spectroscopic method and/or the element concentration in the layer is determined.