| 摘要 |
PURPOSE:To quicken the exhaust velocity of a gas laser medium and to perform speedily a rise of the title device and a change-over of the oscillation mode by actuating a blower which enables the gas laser medium to circulate as an auxiliary means for an exhaust unit. CONSTITUTION:9a on the side near a gas discharge tube 1, a vacuum pump 1 is connected to a heat exchanger 9b on the other side and an ON-OFF valve 15 is connected to a halfway part of a reflux pipe 8 passed through the heat exchanger 9b. In case the oscillation form is changed-over, power supply to main discharge electrodes 3 and 4 is stopped, a blower 10 is stopped, the ON- OFF valve 15 is opened to evacuate until the internal pressure reaches 10Torr or thereabouts by the vacuum pump 1, the ON-OFF valve 15 is closed and the blower 10 is actuated. The blower 10 acts as a booster pump, whereby the evacuating action of the vacuum pump 11 is promoted and the internal pressure in the device including the circulating paths of the gas discharge tube 1, a feed pipe 7 and the reflux pipe 8 can be dropped to a pressure of 10<-1>Torr or less in a short time. |
