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发明名称
SLIME COATING DEVICE
摘要
申请公布号
JPH0479258(A)
申请公布日期
1992.03.12
申请号
JP19900193722
申请日期
1990.07.20
申请人
FUJITSU LTD
发明人
KAMIYOSHI TAKAAKI;MISHIMA KAZUHISA
分类号
H01L23/36
主分类号
H01L23/36
代理机构
代理人
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地址
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