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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0479218(A)
申请公布日期
1992.03.12
申请号
JP19900193721
申请日期
1990.07.20
申请人
FUJITSU LTD
发明人
OOKA AKIRA
分类号
C23C14/06;C23C14/34;C23C14/58;H01L21/28;H01L21/285;H01L21/304;H01L21/3205;H01L23/52
主分类号
C23C14/06
代理机构
代理人
主权项
地址
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