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发明名称
VERFAHREN ZUR HERSTELLUNG SELBSTJUSTIERTER GRAEBEN IN EINEM HALBLEITERSUBSTRAT
摘要
申请公布号
DD298861(A5)
申请公布日期
1992.03.12
申请号
DD19890336109
申请日期
1989.12.22
申请人
VEB FORSCHUNGSZENTRUM MIKROELEKTRONIK DRESDEN,DE
发明人
TEMMLER,DIETMAR,DE;HILLIGER,ANDREAS,DE;KUNATH,CHRISTIAN,DE;ROTHE,OLAF,DE;KRAUSS,MATHIAS,DE
分类号
(IPC1-7):H01L21/72
主分类号
(IPC1-7):H01L21/72
代理机构
代理人
主权项
地址
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