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发明名称
PRECISION CLEANING METHOD
摘要
申请公布号
JPH0478477(A)
申请公布日期
1992.03.12
申请号
JP19900191509
申请日期
1990.07.18
申请人
MITSUBISHI ELECTRIC CORP
发明人
MORITA TOMOJI
分类号
B08B7/00;B24C1/00;B24C3/32
主分类号
B08B7/00
代理机构
代理人
主权项
地址
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