| 摘要 |
In a process for analysing by type an agglomerate consisting of metal particles of different material composition, metal is removed, with the formation of a plasma, at a measurement point from each metal particle (2) by means of a pulsed laser (9), discrete spectral lines, from the radiation intensity of which a characteristic number is formed in accordance with an algorithm (30), are filtered out (12, 11, 8) from the line spectrum of the plasma, and a sorting signal is obtained by comparing (14) the characteristic number with prescribed limiting values. An excimer laser is used in order to achieve a removal of material with approximately the same intensity irrespective of the thickness of the metal particles. <IMAGE> |
