| 摘要 |
PURPOSE:To obtain a method for qualitative analysis which enables the qualitative analysis of a thin-film sample, by a method wherein a characteristic X-ray of which the X-ray intensity ratio lowers when an acceleration voltage is increased is detected and an element corresponding to the detected characteristic X-ray is determined as a thin-film constituent element of a thin-film sample. CONSTITUTION:The qualitative analysis of a constituent element of a thin film and a substrate of a thin-film sample is executed with an acceleration voltage E1 for electrons and thereby the constituent element is made clear. A standard sample of the constituent element (i) made clear is subjected to X-ray analysis with the acceleration voltage E1 and an X-ray intensity ratio K(i,E1) of each element (i) is calculated. The acceleration voltage is set at E2 being higher than E1 on the occasion of the X-ray analysis, the thin-film sample and the standard sample are subjected to the X-ray analysis and an X-ray intensity ratio K(i, E2) of each element (i) is calculated. The X-ray intensity ratio K(i, E1) and the X-ray intensity ratio K(i, E2) are compared with each other, and when K(i, Ei) > K(i, E2), the element (i) is determined to be a constit uent element of the thin film. When K(i, E1)>K(i, E2) is not established, the element (i) is determined to be the constituent element of the substrate. |
