METHOD OF ACTIVATING AT LEAST ONE GAS TO PRODUCE DIFFERENT CHARGED SPECIES, SELECTING SPECIFIC SPECIES, DECELERATING THE SPECIES, AND CHEMICALLY REACTING THE SPECIES TO FORM A THIN FILM

摘要

According to a thin film forming method, at least one type of gas is activated to produce a plurality of species having positive or negative charges. The plurality of species pass through an electric field or magnetic field to extract specific species. The specific species are supplied to a substrate surface. Thereafter, the specific species are chemically reacted with each other to form a thin film. This extraction is performed using a difference in track corresponding to a ratio of mass to charge of the species passing through the electric field.