| 摘要 |
<p>PURPOSE:To protect a wafer from damage caused by contact with a device or hand near a mount by providing a detection means to detect the presence of a wafer on a carrier in each slot and a detection means to detect a wafer projecting from the carrier. CONSTITUTION:When a wafer is brought in or out from a slot with a carrier 1, a carrier mount 2 is positioned so that the slot may be brought to a bringing-in and out position by a hand 3, which is transferred in the direction of Y, which makes it possible to bring the wafer in or out from the slot. However, prior to the bringing-in and out, an attempt is made to check for the presence of the wafer in the slot as occasion demands. This confirmation forces the carrier mount 2 to be positioned so that the slot may be positioned as directed by a wafer detection sensor 7. During the time when the wafer is brought in or out, a sensor 6 is arranged to monitor the presence of wafer projection from the carrier 1 continuously or by specified timing. When the projection is detected, an alarm is sounded so that proper measures, such as 'stop the operation of the device' may be taken.</p> |
